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| Semi-conductors Guide |
| High purity isotropic grapgite for CZ crystal pulling |
Heater and crucible for CZ method |
Contributing to the manufacturing of large scale integrated ciruits,Tokai Carbon supplies isotropic high purity graphite used for silicon crystal pulling equipment(CZ method）. The advantages of the product include high purity and high density united with the availability of custom designing along with a broad rang of sizes. |
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| Fixtures for Semiconductor processes |
Employing its state-of-the-art CNC machining expertise coupled with extensive experience, Tokai Carbon supplies fixtures for semiconductor processes.
For various electronics packages, graphite is used as a sealing fixture for which high precision machning is essential. |
| Graphite parts for wafer processing |
Graphite parts for wafer processing |
High purity graphite is used in various steps of the wafer processing to meet customer requirements,including.
PlasmaCVD Parts
Plasma CVD Susceptors, Electrode Chambers, Ion Implantation Chambers, Sputtering Electrodes, MOCVD Susceptors and other applications. As a low atom number material, graphite has strong resistance to ions or plasma. Under Tokai Carbon's stringent guidelines, graphite is highly purified. Consequently, it is ideally suited for plasma CVD parts, nuclear applications and furnace linings for fusion reactors. |
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| SiC Coated Graphite |
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From standard to custom designs, a broad spectrum of selections. An engineering feat, SiC-coated susceptors combine features of original graphite and SiC coating. Pancake-type susceptors, Barrel-type susceptors, Coated-susceptor parts and SiC-coating services all overcome the disadvantages of graphite materials, such as porosity or particle generation.
The integrated manufacturing capability from a substrate to a coated product promises customers productive versatility. Tokai Carbon's susceptors are designed to balance such graphite properties as particle diameter,porosity, thermal expansion and coating layers.
Products
Barrel-type susceptors
Pancake-type susceptors
Slab-type susceptors
Parts for susceptors
MOVCD susceptors
SiC coating service
Features
Excellent Thermal Shock Resistance
Excellent Physical Shock Resistance
Excellent Chemical Resistance
Super High Purity
Availability in Complex Shape
Usable under Oxidizing Atmosphere
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Application
Susceptors for Epitaxy
Susceptors for CVD
Heaters
Components for Crystal Pullers, etc. |
| TYPICAL PROPERTIES OF BASE GRAPHITE MATERIAL |
| Variety |
Specific Gravity |
Electrical Resistivity |
Flexural Strength |
Shore Hardness |
Ash |
Thermal Conductivity |
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g/cm3 |
μΩm |
MPa |
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ppm |
W/mk |
| GRAPHITE MATERIAL |
1.85 |
11 |
49 |
58 |
< 20 |
120 |
*For the typical properties and impurity elements of SiC layers, refer to SOLID SiC. |
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| Solid SiC |
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SOLID SiC, which has been developed by our unique technology, is a super high purity SiC made by Chemical Vapor Deposition process.
Features
Super High Purity
Super High Purity
Very Little Metal Diffusion
No Outgassing
Theoretical Density (-SiC)
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Application
Wafer Carriers
Susceptors, Dummy Wafer
Guide Rings
Parts for Etching Process
CVD Process, etc. |
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| C/C COMPOSITE TOKAREC |
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"TOKAREC" C/C COMPOSITE is a material with high strength carbon fiber and carbon matrix. This composite having excellent mechanical properties is suitable for use in a variety of high temperature applications.
Features
High Specific Strength and High Specific Modulus
Excellent Heat and Thermal Shock Resistance
Low Coefficient of Thermal Expansion
Low Thermal Conductivity (1/3 of Heat-Resistant Steel)
High Purity
Light weight compared to metal and NO strength decrease at high temperature
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Application
Components for Crystal Pullers
Furnace Structural Parts
Heaters, etc.
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| GLASSY CARBON |
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Glassy Carbon is unique material, which features are Amorphous Structure, No Particle Generation, Gas Impermeability and so on. It has been used in various new applications where conventional Carbon material is inapplicable.
Features
Low Apparent Density
Excellent Chemical Resistance
Gas Impermeability
High Purity
Little Particle Generation
No Outgassing |
Application
Wafer Holders
Heat Reflectors
Susceptors
Guide Rings
Gas Diffuser Electrodes for Plasma Etching
rucibles, Protecting Tubes, etc. |
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| Forms and Dimensions of GLASSY CARBON (unit: mm) |
Custom-Made Products
The maximum size available is 500mm in width and length, and 9mm in thickness. Products of special forms such as cylinders are also available. Please direct your inquiry to Tokai Carbon or its representative. |
| Isotropic Graphite |
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| Extruded Graphite |
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| Molded Graphite |
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